Excimer Laser - PSX-100

World's Smallest Excimer

An innovative multi-gas excimer laser which is both compact and portable and yet is capable of mJ pulse energies and, with a pulse duration of only 2.5 ns, peak powers in excess of 2 MW.

• Compact single unit construction
• Air cooledShort, high peak power pulses
• Efficient discharge circuit with negligible reverse aftercurrent
• Long thyratron life
• Halogen compatible construction for minimal repassivation

Applications

• Photoablation and micromachining
• Semiconductor processing
• Surface analysis
• Laser ionization mass spectroscopy
• Fluorescence spectroscopy
• Photochemistry
• Relaxation time studies
• Nonlinear optics

	F2	ArF	KrCl	KrF	XeCl	XeF
Wavelength	157	193	222	248	308	351	nm
Max. Pulse Energy1	1.0	3.5	0.3	5.0	1.5	8.5	mJ
Pulse Duration	2.5 to 5.0						ns
Max. Peak Power1	400	1400	120	2000	800	600	kW
Max. Average Power2	50	300	20	400	150	100	mW

¹ Measured at 15 Hz
² Measured at maximum repetition rate